An Introduction to Surface-Micromachining by Robert W. Johnstone,Ash Parmaswaran

By Robert W. Johnstone,Ash Parmaswaran

An creation to Surface-Micromachining presents for the 1st time a unified view of surface-micromachining. build up from the fundamental development block of microfabrication ideas, to the overall surface-micromachining layout, it's going to end with the speculation and layout of concrete elements. An advent to Surface-Micromachining connects the producing technique, microscale phenomena, and layout facts to actual shape and serve as.
This e-book could be of curiosity to mechanical engineers trying to scale back into micromachining and microelectronics designers seeking to stream horizontally to micromachining.

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